Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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PRESS TRANS,FOXBORO,0-30PSI,0.5IN product photo

PRESS TRANS,FOXBORO,0-30PSI,0.5IN

Product ID: WH010729
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1/EA
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OBSOLETE - Use WH079788 product photo

OBSOLETE - Use WH079788

Product ID: WH011919
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PUMP,DIAPH,0-5 GPM,WILDEN,P.025,PP product photo

PUMP,DIAPH,0-5 GPM,WILDEN,P.025,PP

Product ID: WH012988
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1/EA
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WRENCH,2.0IN SLIP COUPLING product photo

WRENCH,2.0IN SLIP COUPLING

Product ID: WH014317
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UNION,CONN,0.625TUBEx0.5TUBE,PPRO,JACO product photo

UNION,CONN,0.625TUBEx0.5TUBE,PPRO,JACO

Product ID: WH023345
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RENTAL OF MISC. EQUIPMENT product photo

RENTAL OF MISC. EQUIPMENT

Product ID: WH030194
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MOTOR,AMIAD,1/4 HP,208v/3ph,SAF4500 product photo

MOTOR,AMIAD,1/4 HP,208v/3ph,SAF4500

Product ID: WH078907
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PLC COMP,AB,1769IO,ANALOG OUTPUT,4CHAN product photo

PLC COMP,AB,1769IO,ANALOG OUTPUT,4CHAN

Product ID: WH179055
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Additional membrane holder diam 47+grid product photo

Additional membrane holder diam 47+grid

Product ID: PCC0011H
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Compressed Air Element E-12-A product photo

Compressed Air Element E-12-A

Product ID: 84504200
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O-Ring VITON 70°Shore A D 24,77 x5,33 product photo

O-Ring VITON 70°Shore A D 24,77 x5,33

Product ID: 85481600
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F1124494 product photo

BRKT MTG 8300 11.07X3.57X.70

Product ID: F1124494
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63 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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