Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Air, Gas, and Vent Filtration

SUPRAdisc SD II EK 1 200XEK1S232SP product photo

SUPRAdisc SD II EK 1 200XEK1S232SP

Product ID: 7005243
Unit of Measure
1/STK
Min Order Qty
1

SUPRAdisc SD II 300 200X300S232SP

Product ID: 7005291
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

SUPRAdisc SD II EK 1 200XEK1C440SP

Product ID: 7007249
Unit of Measure
1/STK
Min Order Qty
1

This product is currently not available. Please contact us for more information.

SUPRAdisc SD II 700 200X700C440SP

Product ID: 7007263
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

SUPRAdisc SD II 150 200X150C440SP product photo

SUPRAdisc SD II 150 200X150C440SP

Product ID: 7007321
Unit of Measure
1/EA
Min Order Qty
1

This product is currently not available. Please contact us for more information.

7007323 product photo

SUPRAdisc SD II 300 200X300C440SP

Product ID: 7007323
Unit of Measure
1/EA
Min Order Qty
1

SUPRAdisc SD II 100 200X100C232SPW

Product ID: 7007872
Unit of Measure
1/EA
Min Order Qty
1
1. Recommended Max. Backpressure During Backwash
0.5 bar
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
287 mm
See All Attributes

SUPRAdisc SD II 300 200X300C232SPW

Product ID: 7007876
Unit of Measure
1/EA
Min Order Qty
1
1. Recommended Max. Backpressure During Backwash
0.5 bar
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
287 mm
See All Attributes
CRTG   CFP04NGFFU product photo

CRTG CFP04NGFFU

Product ID: CFP04NGFFU
Unit of Measure
1/EA
Min Order Qty
1
CRTG   CFF92SEDDL product photo

CRTG CFF92SEDDL

Product ID: CFF92SEDDL
Unit of Measure
1/EA
Min Order Qty
1
CRTG   CHP10NGFFK product photo

CRTG CHP10NGFFK

Product ID: CHP10NGFFK
Unit of Measure
1/EA
Min Order Qty
1
CRTG   CHF92HEFFK product photo

CRTG CHF92HEFFK

Product ID: CHF92HEFFK
Unit of Measure
1/EA
Min Order Qty
1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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