Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Use

Pre-Filtration

Poly-Fine® II Filter Cartridge, PFT04510USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT04510USM7W480

Product ID: PFT04510USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
PolyFine-II Filter Cartridge, Polyproylene, 0.45 µm, 60 in, Silicone Elastomer, M8 product photo

PolyFine-II Filter Cartridge, Polyproylene, 0.45 µm, 60 in, Silicone Elastomer, M8

Product ID: PFT04560USM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 40 Inches, Fluorocarbon Elastomer, SOE fin end external 222 O-rings

Product ID: PFT0840UVM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 39 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.8 μm, Polypropylene, Length 39 Inches

Product ID: PFT0839UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.8 µm
PFT 3-29.25US 263 product photo

PFT 3-29.25US 263

Product ID: PFT32925US263
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 225 O-ring product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 Inches, EPDM, SOE fin end external 225 O-ring

Product ID: PFT530UEM22
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 Inches

Product ID: PFT539UEM8
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Emflon® PFRW Junior Style Filter Cartridge, MCY4463PFRWH4

Product ID: MCY4463PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2800 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
5.3 in
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, Fluorocarbon Elastomer, product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 30 Inches, Fluorocarbon Elastomer,

Product ID: PFT0230UVSI
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II Filter Cartridge, PFT02510USM8W480 product photo

Poly-Fine® II Filter Cartridge, PFT02510USM8W480

Product ID: PFT02510USM8W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II Filter Cartridge, PFT02510UEW480 product photo

Poly-Fine® II Filter Cartridge, PFT02510UEW480

Product ID: PFT02510UEW480
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.25 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial, Bulk packaging product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.25 μm, Polypropylene, Length 20 Inches, EPDM, DOE industrial, Bulk packaging

Product ID: PFT02520UEBLK797
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.25 µm
921 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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