Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Gasket / O-Ring Material

Nitrile

Product Use

Pre-Filtration

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, Nitrile product photo

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, Nitrile

Product ID: NXA0510UM3N
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE fin end external 222 O-rings

Product ID: NXA1040UM8N
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXA1040UM3N
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXA4040UM3N
Unit of Measure
12/EA
Min Order Qty
12
Micron
40 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Nitrile, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Nitrile, SOE fin end external 222 O-rings

Product ID: NXA520UM8N
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, SOE fin end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, SOE fin end external 222 O-rings

Product ID: NXA540UM8N
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: NXT10020UM18N
Unit of Measure
12/EA
Min Order Qty
12
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: NXT10040UM18N
Unit of Measure
24/EA
Min Order Qty
24
Micron
100 micron
NXT 10-40U-M8N product photo

Nexis, NXT, 10 μm, 102 cm (40 in), SOE fin end, external 222 O-rings (retrofits other manufacturers’ Code 5), Nitrile gasket

Product ID: NXT1040UM8N
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT1040UM3N
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
NXT 1-20U-DOEN product photo

Nexis, NXT, 1 μm, 50.8 cm (20 in), DOE with elastomer gasket seals and end caps, Nitrile gasket

Product ID: NXT120UDOEN
Unit of Measure
1/EA
Min Order Qty
1
Micron
1 micron
Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 30 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT2030UM3N
Unit of Measure
24/EA
Min Order Qty
24
Micron
20 micron
86 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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