Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cider

WSFZ Housing for Two 16" Modules

Product ID: WSFZ162F31UT5J
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
710 mm
Cartridge Lock
Tie rod & Seal nut
Cartridge Style
Supradisc II
Design Pressure (barg)
0/8 @ 0/40 0/6,2 @ 0/150 Barg / T°C
Housing Height (Metric)
1250 mm
Nominal Diameter (Metric)
450 mm
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WSFZ Housing for Four 16" Modules

Product ID: WSFZ164F31UT5J
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
1260 mm
Cartridge Lock
Tie rod & Seal nut
Cartridge Style
Supradisc II
Design Pressure (barg)
0/8 @ 0/40 0/6,2 @ 0/150 Barg / T°C
Housing Height (Metric)
1830 mm
Nominal Diameter (Metric)
450 mm
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Backflush Support Set-for SUPRAdisc II 16" modules, to be used in WSFZ 16" 4 high housings

Product ID: 20041342
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Food Contact Compliant
Yes
Hot Water Sanitization
85 °C
Steam Sterilization
121 °C
Support Grid
Polypropylene
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SUPRAdisc SD II 80 200X080C440SPW

Product ID: 7007883
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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Palltronic® Blue Pneumatic Tubing (3m) with Stäubli fittings and vent valve (connects Compact Touch to test housing)

Product ID: CT001-OUTTUBING
Unit of Measure
1/EA
Min Order Qty
1
Connections
Staubli Coupling
Length (m)
3 m

Palltronic® Compact Touch Carry Case

Product ID: CT001-CCT
Unit of Measure
1/EA
Min Order Qty
1

Palltronic® Red Pneumatic Tubing (2m) with Stäubli fittings, CT001-INTUBING

Product ID: CT001-INTUBING
Unit of Measure
1/EA
Min Order Qty
1
Connections
Staubli Nipple
Length (m)
2 m

Palltronic® Compact Touch Thermal Printer Paper, CT001-PRTPAPER

Product ID: CT001-PRTPAPER
Unit of Measure
1/EA
Min Order Qty
1
Paper
Thermal
Paper Roll Diameter
45 mm
Paper Roll Length
25 m
Paper Roll Width
58 mm

Palltronic® Compact Touch External Power Supply, CT001-EXTPWR

Product ID: CT001-EXTPWR
Unit of Measure
1/EA
Min Order Qty
1
Adapter Info
Includes EU, UK, US, AU adaptors

External USB-Printer Compact Touch A

Product ID: CT001-USBPRTA
Unit of Measure
1/EA
Min Order Qty
1

Palltronic® Compact Touch Integrity Test Device for final membrane filters

Product ID: CT001
Unit of Measure
1/EA
Min Order Qty
1

FBT Sanitary housing for eight cartridge filters - 762 mm (30”)

Product ID: FBT083G47H43A
Unit of Measure
1/EA
Min Order Qty
1
Bowl Clearance
810 mm
Cartridge Lock
Bayonet-Lock
Cartridge Style
AB Code 7
Design Pressure (barg)
-1/10 Barg @ -10/150 T°C
Food Contact Compliant
Yes
Housing Height (Metric)
1428 mm
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25 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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