Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Metric)

102 mm

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 inches

Product ID: NXT104U
Unit of Measure
120/EA
Min Order Qty
120
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 4 inches

Product ID: NXT2004U
Unit of Measure
30/EA
Min Order Qty
60
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 inches

Product ID: NXA104U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 4 inches

Product ID: NXA054UM3S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer

Product ID: PFT104UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer

Product ID: PFT0454UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.45 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, Fluorocarbon Elastomer

Product ID: PFT024UV
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, EPDM, SOE flat closed end external 222 O-rings product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Highly Asymetric Polysulfone, Length 4 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: PFT024UEM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.2 µm

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 4 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT2004UM3V
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 4 inches, DOE Santoprene gasket seal

Product ID: NXT54UH21
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
4 in
Cartridge Length (Metric)
102 mm
Cartridge Length (Metric)
10.2 cm
Gasket / O-Ring Material
NA
See All Attributes
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 4 Inches, EPDM product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 4 Inches, EPDM

Product ID: PFT54UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Discontinued

This part is no longer available. Please contact us for more information.
Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 4 Inches, Fluorocarbon Elastomer

Product ID: PFT54UVM3
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm

Discontinued

This part is no longer available. Please contact us for more information.
46 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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