Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Family

Athalon

UE210AT04H ELEMENT

Product ID: UE210AT04H
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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Athalon Anti-Static Glass Fiber 7 micron (Beta 2000) Fluorocarbon 8in 20.32cm length

Product ID: UE310AN08Z-COS
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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Athalon, 6000psi Simplex Hsg, 1.25in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310G2013ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: UH310S2408ZC3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: UH310S2408ZG6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310S2413ZC3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310S2413ZG6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310S2413ZG6H
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 20in Length, Fluorocarbon Seals

Product ID: UH310S2420ZG6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 20in Length, Fluorocarbon Seals

Product ID: UH310S2420ZC6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in SAE Ports, 20in Length, Fluorocarbon Seals

Product ID: UH318A2420ZG01
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 600psi Simplex Hsg, 1in SAE Ports, 3in Length, Fluorocarbon Seals

Product ID: UR209HA1603ZA1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
3 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
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625 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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