Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Grade

20 µm

Ultipleat® High Flow, Large Format Filters, Filter Grade 20 µm, Polypropylene, Length 60 Inches

Product ID: HFU660UY200JUW
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
1524 mm (60"""""""")
Filter Grade
20 µm
Hardware Material
Glass Filled Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152.4 mm
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Marksman™, Large Format Filters, Removal Rating 20 μm, Polypropylene, Length Size 2 bag, EPDM

Product ID: NXAM202UEPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Removal Rating 20 μm, Polypropylene, Length Size 2 bag, EPDM, Plastic self-adjusting flange

Product ID: NXAM202UEPFC
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Removal Rating 20 μm, Polypropylene, Length Size 2 bag, No flange

Product ID: NXAM202UNF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 bag
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Removal Rating 20 μm, Polypropylene, Length Size 1 bag

Product ID: NXAM201UNF
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 1 bag
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm
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Marksman™, Large Format Filters, Removal Rating 20 μm, Length Size 2 bag, EPDM

Product ID: NXAMS202UEPFA
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 bag
Filter Grade
20 µm
Hardware Material
Polypropylene
Outside Diameter (Imperial)
6 in
Outside Diameter (Metric)
152 mm

Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 20 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM2020UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 20 Inches, Ethylene Propylene O-ring

Product ID: PFTM2020UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
20/508 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 40 Inches, Nitrile O-ring

Product ID: PFTM2040UHFH13
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 40 Inches, Ethylene Propylene O-ring

Product ID: PFTM2040UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
40/1016 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
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Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 60 Inches, Fluorocarbon Elastomer O-ring

Product ID: PFTM2060UHFH
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes

Marksman™ High Flow, Large Format Filters, Filter Grade 20 µm, polypropylene, Length 60 Inches, Ethylene Propylene O-ring

Product ID: PFTM2060UHFJ
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
60/1524 inches/mm
Filter Grade
20 µm
Hardware Material
Polypropylene
Media Material
Polypropylene
Outside Diameter (Imperial)
6.3 in
Outside Diameter (Metric)
160 mm
See All Attributes
21 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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