Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Media

Double Layer PTFE

FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA2PFRW1

Product ID: KA2PFRW1
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Double Layer PTFE
Maximum Differential Pressure
3.5 bard @ < 40° C (68◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes
FEATURED

Emflon® PFRW Kleenpak™ Capsules, KA3PFRW1

Product ID: KA3PFRW1
Unit of Measure
1/EA
Min Order Qty
1
Membrane Material
Double Layer PTFE
Maximum Differential Pressure
3.5 bard @ < 40° C (68◦ F)
Cage, Core, Fin End and Endcap
Polypropylene
Food Contact Compliant
Yes

Emflon® PFRW Junior Style Filter Cartridges, MCY1110PFRWH4

Product ID: MCY1110PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
500 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
1.3 in
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FEATURED

Emflon® PFRW Junior Style Filter Cartridge, MCY2230PFRWH4

Product ID: MCY2230PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
1400 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
3 in
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FEATURED

Emflon® PFRW Junior Style Filter Cartridge, MCY4440PFRWH4

Product ID: MCY4440PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2300 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
4.1 in
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FEATURED

Emflon® PFRW Junior Style Filter Cartridge, MCY4463PFRWH4

Product ID: MCY4463PFRWH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Industry-Specific Certification
W480 Food Contact
Effective Filtration Area (Metric cm²)
2800 cm²
Filter Cartridge Style
MCY-style junior
Cartridge Length (Imperial)
5.3 in
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FEATURED

Emflon® PFRW Filter Cartridge, AB05PFR7WH4

Product ID: AB05PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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FEATURED

Emflon® PFRW Filter Cartridge, AB05PFR2WH4

Product ID: AB05PFR2WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
4000 cm²
Filter Cartridge Style
Code 2
Cartridge Length (Imperial)
5 in
Cartridge Length (Metric)
127 mm
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Emflon® HTPFRW Filter Cartridges, AB1HTPFR7WH4

Product ID: AB1HTPFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8400 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Emflon® PFRW Filter Cartridge, AB1PFR8WH4

Product ID: AB1PFR8WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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FEATURED

Emflon® PFRW Filter Cartridge, AB1PFR7WH4

Product ID: AB1PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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Emflon® PFAW Filter Cartridge, 0.2µm, 20 in, Single Open Ended Code 7, Silicone Elastomer O-ring

Product ID: AB2PFA7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket O-Ring Code
H4
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16 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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