Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Gasket / O-Ring Material

Silicone

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 10 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT0210USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M7
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 20 Inches, silicone

Product ID: DFNT0220US
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 0.2 μm, Length 30 Inches, silicone, SOE fin end external 226 O-rings

Product ID: DFNT0230USM7B334
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.2 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M7
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 0.45 μm, Length 29.25 Inches, silicone, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT0452925US
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
0.45 µm
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
Silicone
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® , Filter Cartridges, Removal Rating 10 μm, Length 20 Inches, silicone, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT1020US
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
10 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® , Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, silicone

Product ID: DFNT120US42
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, silicone, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT120US
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches, silicone, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFNT130US
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
End Configuration
Blank - DOE with elastomer gasket seals & end caps
See All Attributes

Duo-Fine® II, Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, silicone, SOE fin end external 222 O-rings

Product ID: DFNT310USM8
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M8
See All Attributes

Duo-Fine®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, silicone

Product ID: DFPT140ESM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1 µm
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
End Configuration Code
M3
See All Attributes

Nexis® A Series Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches, silicone

Product ID: NXA5020UM7S
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
See All Attributes
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE flat closed end external 222 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA510UM3S
Unit of Measure
30/EA
Min Order Qty
30
Micron
5 micron
446 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

    Select Language :
    English