Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Material of Construction

Aluminum

Athalon, 600psi Simplex Hsg, 1in SAE Ports, 3in Length, Fluorocarbon Seals

Product ID: UR209HA1603ZA1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
3 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 1in SAE Ports, 3in Length, Fluorocarbon Seals

Product ID: UR209HA1603ZG1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
3 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 1in SAE Ports, 7in Length, Fluorocarbon Seals

Product ID: UR209HA1607ZG1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
7 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 1in SAE Ports, 7in Length, Fluorocarbon Seals

Product ID: UR209HA1607ZA1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
7 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

UR209HC1603ZA1 ASSEMBLY HOUSING

Product ID: UR209HC1603ZA1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
3 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

UR209HC1603ZG1 ASSEMBLY HOUSING

Product ID: UR209HC1603ZG1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
3 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

UR209HC1607ZA1 ASSEMBLY HOUSING

Product ID: UR209HC1607ZA1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
7 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

UR209HC1607ZG1 ASSEMBLY HOUSING

Product ID: UR209HC1607ZG1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
7 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 1in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UR210A1613ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Athalon, 600psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UR210A1608ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 600psi Simplex Hsg, 1.25in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UR210A2013ZA
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Athalon, 600psi Simplex Hsg, 1.25in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UR210A2008ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
600 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes
121 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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