Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Material of Construction

Iron|Steel

Ultipor, 6500psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4510A16SB9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Ultipor, 6500psi Non-bypass Simplex Hsg, 1in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4511C16SW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Ultipor, 6500psi Non-bypass Simplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4711G24TW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

Ultipor, 6500psi Duplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4740G24TB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
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Ultipor, 6500psi Duplex Hsg, 1.5in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4740G24SB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Non-bypass Simplex Hsg, 1.5in BSP Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ4711C24UW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Ultipor, 6500psi Duplex Hsg, 1.5in BSP Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ4740C24UB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

HZ4711C24TW9YE47 ASSEMBLY HOUSING

Product ID: HZ4711C24TW9YE47
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor, 6500psi Duplex Hsg, 1.5in BSP Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ4740C24TB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Duplex Hsg, 1.5in Flange Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ4740G24UB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Duplex Hsg, 1.5in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4740C24SB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes

Ultipor, 6500psi Non-bypass Duplex Hsg, 1.5in BSP Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ4741C24SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6500 psi
Port Size
1.5 in
Number of Cartridges
1 per side
See All Attributes
364 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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