Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Material of Construction

Iron|Steel

Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UH210A2013ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 13in Length, Fluorocarbon Seals

Product ID: UH210A2013ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 20in Length, Fluorocarbon Seals

Product ID: UH210A2020ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

UH210A1604ZG ASSY HOUSING

Product ID: UH210A1604ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1in SAE Ports, 4in Length, Fluorocarbon Seals

Product ID: UH210A1604ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210A1608ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210A2008ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.25in SAE Ports, 8in Length, Fluorocarbon Seals

Product ID: UH210A2008ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

UH210C1613ZG ASSY HOUSING

Product ID: UH210C1613ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

UH210C1604ZGH ASSY HOUSING

Product ID: UH210C1604ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
4 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes

UH210C2008ZG ASSY HOUSING

Product ID: UH210C2008ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
See All Attributes

UH210A1608ZG ASSY HOUSING

Product ID: UH210A1608ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
See All Attributes
364 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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