Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Profile® II Filter Capsule product photo

Profile® II Filter Capsule

Product ID: PCF1Y400N04
Unit of Measure
1/EA
Min Order Qty
1

CENTERPOST 1 MODULE

Product ID: PDC20025
Unit of Measure
1/EA
Min Order Qty
1

KIT PDC80020S

Product ID: PDC80020S
Unit of Measure
1/EA
Min Order Qty
1

WSFZ Top Centerpost Gasket

Product ID: PDC80102P
Unit of Measure
1/EA
Min Order Qty
1

KIT PDC20142S

Product ID: PDC20142S
Unit of Measure
1/EA
Min Order Qty
1
PERMI-L 7.68-U-VENT-P product photo

PERMI-L 7.68-U-VENT-P

Product ID: PERMIL768UVENTP
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Bulk
See All Attributes
PERMI-L 57-U-A-R 624 product photo

PERMI-L 57-U-A-R 624

Product ID: PERMIL57UAR624
Unit of Measure
272/EA
Min Order Qty
272
Packaging
Bulk
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Vector™ Large Format Filters, Removal Rating 10 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange

Product ID: PEV102UNPFA
Unit of Measure
1/EA
Min Order Qty
1
Cartridge Length
Size 2 cartridge
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 10 μm, Polyester, Size 2 cartridge, No flange

Product ID: PEV102UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
10 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 1 μm, Polyester, Size 2 cartridge, Nitrile, Plastic self-adjusting flange, FSI CBFP Series vessels

Product ID: PEV12UNPFCB
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
1 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 25 μm, Polyester, Size 2 cartridge, No flange

Product ID: PEV252UNF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
25 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
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Vector™ Large Format Filters, Removal Rating 25 μm, Polyester, Size 2 cartridge

Product ID: PEV252UVPFF
Unit of Measure
4/EA
Min Order Qty
4
Cartridge Length
Size 2 cartridge
Filter Grade
25 µm
Hardware Material
Polypropylene
Media Material
Polyester
Outside Diameter (Imperial)
6.25 in
Outside Diameter (Metric)
158.8 mm
See All Attributes
1,553 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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