Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Filter Removal Rating

40 µm

Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 6 Inches

Product ID: HC2235FRR6
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Element Series
HC2235
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
40 micron
Filter Removal Rating (μm)
40 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 40 μm, GlassFiber, Length 39 Inches

Product ID: HC8904FRR39Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Element Series
HC8904
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
40 micron
Filter Removal Rating (μm)
40 µm
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UE210KR01Z ELEMENT

Product ID: UE210KR01Z
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Element Series
UE210
Family
Athalon
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
1 in
Nominal Length (Metric)
2.54 cm
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Athalon 40 micron Fluorocarbon 40in 101.6cm

Product ID: UE310KR40Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Element Series
UE310
Family
Athalon
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
40 in
Nominal Length (Metric)
101.6 cm
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Athalon 40 micron Fluorocarbon 20in 50.8cm

Product ID: UE610KR20Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Element Series
UE610
Family
Athalon
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
20 in
Nominal Length (Metric)
50.8 cm
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Athalon 40 micron Fluorocarbon 40in 101.6cm

Product ID: UE610KR40Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Element Series
UE610
Family
Athalon
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
40 in
Nominal Length (Metric)
101.6 cm
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6 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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