Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Filter Removal Rating

22 µm

HCY-8300EOJ16H

Product ID: HCY8300EOJ16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
16 in
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HCY-8300EOJ39HYK

Product ID: HCY8300EOJ39HYK
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
39 in
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This product is currently not available. Please contact us for more information.

Red1000 Wire Mesh 22 micron Nitrile 4in 10.16cm

Product ID: HCY9020EOJ4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY902
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
4 in
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UE209AT03H - REP BY UE209AT03Z

Product ID: UE209AT03H
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE209
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 2000
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Athalon Anti-Static Glass Fiber 22 micron (Beta 2000) Nitrile 7in 17.78cm length

Product ID: UE209AT07HN1
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE209
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 2000
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Athalon Glass Fiber 22 micron (Beta 2000) Fluorocarbon 8in 20.32cm

Product ID: UE210AT08Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 2000
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ELEMENT UE310AT13Z

Product ID: UE310AT13Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 2000
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Ultipleat SRT Glass Fiber 22 micron (Beta 1000) Nitrile 20in 50.8cm

Product ID: F1389409
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
UE619
Family
Ultipleat SRT
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2216FRT6Z)

Product ID: HC2216FKT6H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2216
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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This product is currently not available. Please contact us for more information.

HC2226EOJ6H50

Product ID: HC2226EOJ6H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2226
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
6 in
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HC2233EOJ6H

Product ID: HC2233EOJ6H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2233
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
6 in
See All Attributes

Red1000 Glass Fiber 25 micron (Beta 1000) Fluorocarbon 13in 33.02cm (REPLACED BY HC2237FHT13Z)

Product ID: HC2237FDT13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2237
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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This product is currently not available. Please contact us for more information.

43 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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