Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product ID: 12684

Unit of Measure
9/EA
Min Order Qty
9

A005621249 product photo
Product ID: A005621249

Unit of Measure
10/EA
Min Order Qty
10

Product ID: A005622249

Unit of Measure
10/EA
Min Order Qty
10

Product ID: A1555249

Unit of Measure
30/EA
Min Order Qty
30

Product ID: A1449249

Unit of Measure
30/EA
Min Order Qty
30

Product ID: A9935249

Unit of Measure
10/EA
Min Order Qty
10

Product ID: AB01Y03018J

Unit of Measure
3/EA
Min Order Qty
3
Removal Rating
3 µm
Effective Filtration Area (Metric cm²)
50 cm²
Format
1" filter cartridge
Material
Polypropylene
See All Attributes

Product ID: AB04P00319JTIMMD

Unit of Measure
1/EA
Min Order Qty
1

Product ID: AB04P40018JTIMMD

Unit of Measure
1/EA
Min Order Qty
1

Product ID: AB1P00519JTIMONIUM

Unit of Measure
24/EA
Min Order Qty
48

Product ID: AB1P00319JTIMONIUM

Unit of Measure
24/EA
Min Order Qty
24

AB1P05018J product photo
Product ID: AB1P05018J

Unit of Measure
24/EA
Min Order Qty
24

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data sheets