Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Cartridge Length (Imperial)

9.875 in

Product Type

Filter Cartridges

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 9.875 inches

Product ID: NXT1009875U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 9.875 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 9.875 inches, DOE Santoprene gasket seal

Product ID: NXT1009875UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
100 micron

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.875 inches

Product ID: NXT109875UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 9.875 inches product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 9.875 inches

Product ID: NXT1509875UH21
Unit of Measure
30/EA
Min Order Qty
30
Micron
150 micron

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 9.875 inches

Product ID: NXT2009875UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
200 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 9.875 inches

Product ID: NXT39875UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 9.875 inches, DOE Santoprene gasket seal

Product ID: NXT509875UH21
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 9.875 inches

Product ID: NXT59875U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 9.875 inches

Product ID: CLR109875
Unit of Measure
72/EA
Min Order Qty
72
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 9.875 inches

Product ID: CLR19875
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.875 inches

Product ID: CLR209875
Unit of Measure
36/EA
Min Order Qty
36
Length
25.1 cm / 9.875 in
Micron
20 micron

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 9.875 inches

Product ID: CLR509875
Unit of Measure
36/EA
Min Order Qty
36
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
See All Attributes
13 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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