Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Metric)

413 mm

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 16.25 inches

Product ID: NXT101625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 150 μm, Polypropylene, Length 16.25 inches

Product ID: NXT1501625UM3F
Unit of Measure
12/EA
Min Order Qty
12
Micron
150 micron
Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 200 μm, Polypropylene, Length 16.25 inches

Product ID: NXT2001625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
200 micron
Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 16.25 inches

Product ID: NXT251625UM3F
Unit of Measure
12/EA
Min Order Qty
12
Micron
25 micron
Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 16.25 inches

Product ID: NXT301625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
30 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 16.25 inches

Product ID: NXT501625UM3F
Unit of Measure
12/EA
Min Order Qty
12
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 16.25 inches

Product ID: NXT51625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 16.25 inches

Product ID: NXT751625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
75 micron
8 Items
  • 1

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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