Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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CTRG BW HDC H050 C7 H 3H product photo

CTRG BW HDC H050 C7 H 3H

Product ID: BWAB3P050XHS
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1/EA
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1

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CTRG BW HDC H400 C7 (4-HIGH) product photo

CTRG BW HDC H400 C7 (4-HIGH)

Product ID: BWAB4P400XHS
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CTRG BW HDC HS-40 C7 40" product photo

CTRG BW HDC HS-40 C7 40

Product ID: BWAB4P1000XHS
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 304 stainless steel

Product ID: C001A10A
Unit of Measure
30/EA
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, Electrolytic tin plated steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, Electrolytic tin plated steel

Product ID: C001A10T
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 19.5 Inches, 304 stainless steel

Product ID: C001AW195A
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel, with Core Cover product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel, with Core Cover

Product ID: C001A10SC
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 20 Inches, 304 stainless steel, with Core Cover

Product ID: C001AW20AC
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
1 µm
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
Cartridge Outer Diameter (OD) (Metric)
6.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 10 Inches, 316 stainless steel, Bulk packaging

Product ID: C001A10S
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30/EA
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C001AW20U product photo

C001AW20U

Product ID: C001AW20U
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 30 Inches

Product ID: C001AW30SNM3S
Unit of Measure
10/EA
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10
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C001AW20S product photo

C001AW20S

Product ID: C001AW20S
Unit of Measure
10/EA
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10
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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