Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Coralon Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm

Product ID: 7400686
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9021
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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Coralon Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: 7400687
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
Nominal Length (Imperial)
8 in
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Coralon Glass Fiber 25 micron (Beta 1000) Nitrile 8in 20.32cm

Product ID: 7400688
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9601
Family
Coralon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
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Ultipor III

Product ID: 7993022
Unit of Measure
1/EA
Min Order Qty
1

GE LOCOMOTIVE 30

Product ID: 84A220402ABP1
Unit of Measure
1/EA
Min Order Qty
1

Athalon Glass Fiber 7 micron (Beta 2000) Fluorocarbon 8in 20.32cm

Product ID: 8FL20043-01
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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Athalon Glass Fiber 7 micron (Beta 2000) Fluorocarbon 4in 10.16cm

Product ID: 8FL51010-01
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE310
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 2000)
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9IN 75 0,2UM DOE

Product ID: 9IN7502UMDOE
Unit of Measure
1/EA
Min Order Qty
1

9IN 75 10UM DOE

Product ID: 9IN7510UMDOE
Unit of Measure
1/EA
Min Order Qty
1

9IN 75 1UM DOE

Product ID: 9IN751UMDOE
Unit of Measure
1/EA
Min Order Qty
1

9IN 75 5UM DOE

Product ID: 9IN755UMDOE
Unit of Measure
1/EA
Min Order Qty
1

A005621249

Product ID: A005621249
Unit of Measure
10/EA
Min Order Qty
10

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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