Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, SOE flat closed end external 222 O-rings product photo
Unit of Measure
60/EA
Min Order Qty
60
Micron
50 micron
Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings product photo

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXA520UM7S
Unit of Measure
12/EA
Min Order Qty
12
Micron
5 micron

Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 19.5 inches

Product ID: NXT25195U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 10 Inches, 304 stainless steel

Product ID: GG05A10A1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT540NM3V181
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
Fluorocarbon Elastomer
End Configuration Code
M3
End Configuration
M3 - SOE flat closed end, external 222 O-rings (retrofits other manufacturers’ Code 0)4
Cartridge Type
NXT
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5µm, 10", DOE w/seal

Product ID: MCY1001A050J
Unit of Measure
1/EA
Min Order Qty
1
T005AW30T product photo

T005AW30T

Product ID: T005AW30T
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 1 μm, Length 40 Inches, 304 stainless steel

Product ID: RT001AW40A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F030H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel, Bulk packaging product photo

DFT Classic®, Filter Cartridges, Removal Rating 30 μm, Length 20 Inches, 316 stainless steel, Bulk packaging

Product ID: C030AW20S
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped product photo

DFT Classic®, Filter Cartridges, Removal Rating 50 μm, Nylon, Length 30 Inches, 304 stainless steel, Individually wrapped

Product ID: N050AW30A1PK
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 304 stainless steel, with Extended  Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 30 Inches, 304 stainless steel, with Extended Core

Product ID: U020AW30AEC1A
Unit of Measure
10/EA
Min Order Qty
10
Packaging
Bulk
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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