Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Industries

Oil & Gas

Cartridge Length (Metric)

254 mm

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, SOE flat closed end external 222 O-rings

Product ID: NXT5010UM3T
Unit of Measure
60/EA
Min Order Qty
60
Micron
50 micron
DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 10 Inches, 304 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 0.5 μm, Length 10 Inches, 304 stainless steel

Product ID: GG05A10A1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F030H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 100 μm, Length 10 Inches, 316 stainless steel

Product ID: G100A10S1PK
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 10 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 20 μm, Length 10 Inches, Polypropylene

Product ID: U020A10U
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 316 stainless steel

Product ID: G005A10S1PK
Unit of Measure
1/EA
Min Order Qty
1
Packaging
Individually wrapped
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DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, Polypropylene product photo

DFT Classic®, Filter Cartridges, Removal Rating 10 μm, Length 10 Inches, Polypropylene

Product ID: U010A10UC
Unit of Measure
30/EA
Min Order Qty
30
Packaging
Bulk
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Duo-Fine® , Filter Cartridges, Removal Rating 3 μm, Length 10 Inches, Nitrile, Blank - DOE with elastomer gasket seals & end caps

Product ID: DFN310AN
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Nitrile
End Configuration
Blank - DOE with elastomer gasket seals & end caps
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches

Product ID: NXT0510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron
Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches product photo

Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 10 inches

Product ID: NXA4010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
40 micron
DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 304 stainless steel, with Extended Core product photo

DFT Classic®, Filter Cartridges, Removal Rating 5 μm, Length 10 Inches, 304 stainless steel, with Extended Core

Product ID: C005A10AEC1A
Unit of Measure
16/EA
Min Order Qty
16
Packaging
Bulk
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches

Product ID: NXT1010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
10 micron
105 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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