Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Cartridge Length (Imperial)

29.25 in

Product Type

Filter Cartridges

Filter Media

Polypropylene

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 Inches

Product ID: PFT52925UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 µm
NXA 10-29.25U-DOEV product photo

Nexis, NXA, 10 μm, 74.3 cm (29.25 in), DOE with elastomer gasket seals and end caps, Fluorocarbon Elastomer gasket

Product ID: NXA102925UDOEV
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 micron

Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches

Product ID: NXA52925U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 29.25 inches

Product ID: CLR202925
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 15 μm, Polypropylene, Length 29.25 inches

Product ID: NXT152925U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
15 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 29.25 inches, DOE industrial (no end caps)

Product ID: NXT1002925U30MM
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
100 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 29.25 inches, silicone, DOE - DOE with elastomer gasket seals and end caps

Product ID: NXT12925UDOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
Silicone
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Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 29.25 Inches

Product ID: PFT102925UE
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 Inches product photo

Poly-Fine® II, Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 Inches

Product ID: PFT32925US267
Unit of Measure
1/EA
Min Order Qty
1
Micron
3 µm

Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches

Product ID: CLR32925
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 29.25 inches

Product ID: NXT502925U
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
See All Attributes

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 29.25 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT32925UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
EPDM
See All Attributes
37 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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