Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Product Type

Filter Cartridges

Length

102 cm / 40 in

Filter Media

Polypropylene

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 40 inches

Product ID: CLR1040
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
10 micron
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 40 inches

Product ID: CLR140
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
1 micron
Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches

Product ID: CLR2040
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
20 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 39 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 39 inches

Product ID: CLR3039
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 40 inches

Product ID: CLR3040
Unit of Measure
1/EA
Min Order Qty
1
Length
102 cm / 40 in
Micron
30 micron
Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches

Product ID: CLR340
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
3 micron
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches

Product ID: CLR5010
Unit of Measure
36/EA
Min Order Qty
36
Length
102 cm / 40 in
Micron
50 micron
Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches

Product ID: CLR5040
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
50 micron
Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches

Product ID: CLR540
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
5 micron
Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches product photo

Claris® Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches

Product ID: CLR7540
Unit of Measure
12/EA
Min Order Qty
12
Length
102 cm / 40 in
Micron
75 micron
10 Items
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Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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