Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Availability

In Stock

Product Type

Filter Cartridges

Filter Media

Polypropylene

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR530M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridge, CLR130W480

Product ID: CLR130W480
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket O-Ring Code
Blank
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Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: RM1F030H21TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
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Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-ring

Product ID: NXT5010UM18F
Unit of Measure
30/EA
Min Order Qty
30
Micron
50 micron

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: CLR520M7S
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridge, 10 µm, 40 in, Single Open Ended with Fin End and External 222 O-rings

Product ID: CLR1040M8WE480
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
10 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Ethylene Propylene Rubber
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches product photo

Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 39 inches

Product ID: CLR539
Unit of Measure
12/EA
Min Order Qty
12
Length
99.1 cm / 39 in
Micron
5 micron

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches, Timonium

Product ID: R1F010TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Filter Cartridge Style
RF-style
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
End Configuration
R type housing
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Poly-Fine® XLD Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 20 inches, silicone, SOE fin end external 226 O-rings

Product ID: XLD4020USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
Silicone
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Claris® Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps), Polypropylene Core

Product ID: CLR540M3HN
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Change Out Differential Pressure
2.4 bard
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Poly-Fine® II Filter Cartridge, PFT1030USM7W480 product photo

Poly-Fine® II Filter Cartridge, PFT1030USM7W480

Product ID: PFT1030USM7W480
Unit of Measure
1/EA
Min Order Qty
1
Micron
10 µm
Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches product photo

Claris® Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 10 inches

Product ID: CLR110
Unit of Measure
36/EA
Min Order Qty
36
Length
25.4 cm / 10 in
Micron
1 micron
160 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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