Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 9.75 inches

Product ID: NXT50975U
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXT510UDOES
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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NXT 5-10U-DOET product photo

Nexis, NXT, 5 μm, 25.4 cm (10 in), DOE with elastomer gasket seals and end caps, Expanded PTFE (gaskets) - DOE option FEP encapsulated silicone (O-rings) - SOE option

Product ID: NXT510UDOET
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 40 inches

Product ID: NXT5040U
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 4 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 4 inches

Product ID: NXT504U
Unit of Measure
30/EA
Min Order Qty
30
Micron
50 micron

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 9.75 inches, DOE industrial (no end caps)

Product ID: NXT50975U729
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 9.875 inches, DOE Santoprene gasket seal

Product ID: NXT509875UH21
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
50 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.875 in
Cartridge Length (Metric)
251 mm
Cartridge Length (Metric)
25.1 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT50TFUDOEE47
Unit of Measure
5/EA
Min Order Qty
5
Removal Rating
50 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - DOE with elastomer gasket seals and end caps
Cartridge Type
NXT
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NXT 5-10U-H21 product photo

Nexis, NXT, 5 μm, 25.4 cm (10 in), DOE, Santoprene gasket seal

Product ID: NXT510UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
5 micron

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT510UDOEE
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, Fluorocarbon Elastomer, DOE with elastomer gasket seals and end caps

Product ID: NXT510UDOEV
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 16.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 16.25 inches

Product ID: NXT51625UM3F
Unit of Measure
24/EA
Min Order Qty
24
Micron
5 micron
1,754 Items

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

*Please refer to the documentation for additional specifications.

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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