Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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RF-Style 19" Profile II 40µm

Product ID: R19F400
Unit of Measure
24/EA
Min Order Qty
24

CRTG R19F300

Product ID: R19F300
Unit of Measure
24/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches

Product ID: RM3F030H21
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
3 µm
Membrane Material
Polypropylene
Filter Cartridge Style
RMF-style
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
See All Attributes

MCY1001W003J 254

Product ID: MCY1001W003J254
Unit of Measure
12/EA
Min Order Qty
12

ME3310CPN40H

Product ID: ME3310CPN40H
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPT30H

Product ID: ME3310CPT30H
Unit of Measure
1/EA
Min Order Qty
1

ME3310CPT40H

Product ID: ME3310CPT40H
Unit of Measure
1/EA
Min Order Qty
1

20" Profile® II Nylon Filter Cartridge

Product ID: HC3310FGP20Z
Unit of Measure
12/EA
Min Order Qty
24

Profile® II, Filter Cartridges, Polypropylene, Length 10 Inches

Product ID: R1F1200
Unit of Measure
24/EA
Min Order Qty
24
End Configuration
R type housing
Typical Flow Rate
< 1

CTRG PRFL HARD NYLON

Product ID: WK16B07HKBND
Unit of Measure
320/EA
Min Order Qty
320

49834716

Product ID: 49834716TIMONIUM
Unit of Measure
24/EA
Min Order Qty
24

49834716

Product ID: 49834716
Unit of Measure
24/EA
Min Order Qty
24

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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