Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

Order Products

Filtro 1" Profile II 3µm product photo

Filtro 1" Profile II 3µm

Product ID: AB01Y03018J
Unit of Measure
3/EA
Min Order Qty
3
AB01Y20018J product photo

Filter 1" Profile II 20µm

Product ID: AB01Y20018J
Unit of Measure
3/EA
Min Order Qty
3

AB04P40018J

Product ID: AB04P40018JTIMMD
Unit of Measure
48/EA
Min Order Qty
48

AB04P00319J

Product ID: AB04P00319JTIMMD
Unit of Measure
48/EA
Min Order Qty
48

AB1P00319J

Product ID: AB1P00319JTIMONIUM
Unit of Measure
24/EA
Min Order Qty
24

AB1P00519J

Product ID: AB1P00519JTIMONIUM
Unit of Measure
24/EA
Min Order Qty
48
AB1P05018J product photo

AB1P05018J

Product ID: AB1P05018J
Unit of Measure
24/EA
Min Order Qty
24

AB1PYN18J

Product ID: AB1PYN18J
Unit of Measure
24/EA
Min Order Qty
48

AB1Y0053H1

Product ID: AB1Y0053H1TIMONIUM
Unit of Measure
12/EA
Min Order Qty
12

AB1W00325J

Product ID: AB1W00325J
Unit of Measure
12/EA
Min Order Qty
12

AB1Y0103H13

Product ID: AB1Y0103H13TIMMD
Unit of Measure
12/EA
Min Order Qty
12

AB1Y0058J

Product ID: AB1Y0058JTIMONIUM
Unit of Measure
12/EA
Min Order Qty
12

Description

Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.

Applications

Microelectronics:

  • Chemical mechanical processing (CMP)

Specifications

 

Removal Ratings

 

  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 

 

Pressure Drop vs. Liquid Flow Rate1

 

1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.

Documents

Data Sheets

  • Profile® II Filters for CMP Applications

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