Profile® II Depth Filters for CMP Applications

High-Efficiency Depth Filters for CMP Application Filtration

Profile II depth filter cartridges for chemical mechanical processing (CMP) applications effectively remove agglomerated particles and gels from oxide, tungsten and copper slurries without disturbing particle distribution. The steep efficiency curves in these filters result in minimal strip-out of desirable slurry particles while sharply increasing the removal of oversized particles.

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Product Type

Filter Cartridges

Gasket / O-Ring Material

Fluorocarbon Elastomer

Filter Media


Profile® II, Filter Cartridges, Polypropylene, Length 30 Inches, Fluorocarbon Elastomer

Product ID: AB3Y40018H
Unit of Measure
Min Order Qty
Membrane Material
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
753 mm
Cartridge Length (Metric)
75.3 cm
Gasket / O-Ring Material
Fluorocarbon Elastomer
Cartridge Outer Diameter (OD) (Imperial)
2.75 in
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Why choose CMP depth filter cartridges?

These depth filters are available in removal ratings from 0.2 to 40 µm, which are five to 10 times finer than traditional depth filter ratings. They also include a continuously profiled pore structure for built-in prefiltration.



  • Chemical mechanical processing (CMP)



Removal Ratings


  • 0.2 µm, 0.3 µm, 0.5 µm, 1 µm, 3 µm, 5 µm, 10 µm, 20 µm, 30 µm and 40 µm 


Pressure Drop vs. Liquid Flow Rate1


1 For liquids with viscosities differing from water, multiply the pressure drop by the viscosity in centipoise.


Data Sheets

  • Profile® II Filters for CMP Applications

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