Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

Nexis®

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches

Product ID: NXT310U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, Fluorocarbon Elastomer, SOE flat closed end external 222 O-rings

Product ID: NXT330UM3V
Unit of Measure
12/EA
Min Order Qty
24
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, silicone, SOE fin end external 222 O-rings

Product ID: NXT330UM8S
Unit of Measure
1/EA
Min Order Qty
12
Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 29.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 29.25 inches

Product ID: NXT402925U
Unit of Measure
10/EA
Min Order Qty
10
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal

Product ID: NXT50195UH21
Unit of Measure
10/EA
Min Order Qty
10
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-rings

Product ID: NXT520UM3N
Unit of Measure
1/EA
Min Order Qty
12
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches, DOE 2.54 cm (1 in) extended core product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 29.25 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT52925U1X
Unit of Measure
12/EA
Min Order Qty
12
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXT530UDOES
Unit of Measure
1/BOX
Min Order Qty
1
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, SOE metal spring/polypropylene cap saw cut end product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 30 inches, SOE metal spring/polypropylene cap saw cut end

Product ID: NXT530USI
Unit of Measure
1/EA
Min Order Qty
1
Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches, Nitrile, DOE with elastomer gasket seals and end caps

Product ID: NXT540UDOEN
Unit of Measure
1/EA
Min Order Qty
12

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 10 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXT7510UDOEE
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
75 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
See All Attributes
Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches, DOE 2.54 cm (1 in) extended core product photo

Nexis® T Filter Cartridges, Removal Rating 75 μm, Polypropylene, Length 40 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT7540U1X
Unit of Measure
12/EA
Min Order Qty
12

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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