Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filtermembran d 47mm / 7µm

Product ID: GHA900-007
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GHA900-007N product photo

Filtermembran d 47mm / 7µm

Product ID: GHA900-007N
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1/EA
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Filtermembran d 47mm / 10µm

Product ID: GHA900-010
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Discontinued

This part is no longer available. Please contact us for more information.
GHA900-010N product photo

Filtermembran d 47mm / 10µm

Product ID: GHA900-010N
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1/EA
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KIT GK4488PB01

Product ID: GK4488PB01
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GP 0.2-30A-X4V 246 product photo

GP 0.2-30A-X4V 246

Product ID: GP0230AX4V246
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GP 0.45-10U-X4N 246

Product ID: GP04510UX4N246
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GP 10-20A-X4V 246

Product ID: GP1020AX4V246
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This product is currently not available. Please contact us for more information.

GP 30-10U-X4N 246

Product ID: GP3010UX4N246
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GP 1-4U-X3S 246

Product ID: GP14UX3S246
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GP 3-30A-X4N 246

Product ID: GP330AX4N246
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GP 50-10U-X4N 246

Product ID: GP5010UX4N246
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Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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