Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Nominal Length (Imperial)

16 in

Element Series

HC9604

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 25 μm, GlassFiber, Length 16 inches

Product ID: HC9604FRT16HYR76
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9604
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
25 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 3 μm, GlassFiber, Length 16 inches

Product ID: HC9604FRZ16Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9604
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
See All Attributes

Ultipor III Glass Fiber 7 micron (Beta 1000) 16in 40.64cm (REPLACED BY H9604FRNUYUR)

Product ID: H9604FKNUYUR
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC9604FRN16HYE)

Product ID: HC9604FKN16HYE
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Fluorocarbon 16in 40.64cm (REPLACED BY HC9604FRN16ZYQ63)

Product ID: HC9604FKN16ZYQ63
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) 16in 40.64cm length

Product ID: HC9604FKN16HKIT
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC9604FRN16HYUR)

Product ID: HC9604FKN16HYUR
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC9604FRP16Z)

Product ID: HC9604FKP16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 5 micron (Beta 1000) Fluorocarbon 16in 40.64cm length

Product ID: HC9604FMP16Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor SRT Glass Fiber 5 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC9604FRP16Z)

Product ID: HC9604FMP16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

This product is currently not available. Please contact us for more information.

22 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English