Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Removal Rating

12 µm

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Ultipor SRT

Ultipor SRT Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 13in 33.02cm length

Product ID: HC9604FMS13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
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Ultipor SRT Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9604FMS8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9604
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC9800FMS8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9800
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 4in 10.16cm length

Product ID: HC9804FMS4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC9804
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Ultipor SRT Glass Fiber 12 micron (Beta 1000) Nitrile 40in 101.6cm (REPLACED BY HC2018FRS40HYQ79)

Product ID: HC2018FAS40HYQ79
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2018
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Ultipor SRT Anti-Static Glass Fiber 12 micron (Beta 1000) Fluorocarbon 39in 99.06cm length

Product ID: HC2023FMS39Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2023
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 11in 27.94cm length

Product ID: HC2104FMS11H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2104
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Ultipor SRT Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 17in 43.18cm length

Product ID: HC2288FMS17H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2288
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor SRT Glass Fiber 12 micron (Beta 1000) Nitrile 16in 40.64cm (REPLACED BY HC4704FRS16Z)

Product ID: HC4704FAS16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC4704
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor SRT Anti-Static Glass Fiber 12 micron (Beta 1000) Nitrile 16in 40.64cm length (REPLACED BY HC4704FRS16Z)

Product ID: HC4704FMS16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC4704
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

HC5304FAS20Z

Product ID: HC5304FAS20Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC5304
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

HC7414FMS4H

Product ID: HC7414FMS4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC7414
Family
Ultipor SRT
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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