Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Housings, Vessels, and Assemblies

UH310G2420ZG ASSY HOUSING

Product ID: UH310G2420ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310K2413ZG3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: UH310S2408ZC6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: UH310K2408ZG3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310K2413ZC6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310S2413ZC6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UH310G3240ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Metric Flange (6000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: UH310S2408ZC3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 20in Length, Fluorocarbon Seals

Product ID: UH310S2420ZG6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 20in Length, Fluorocarbon Seals

Product ID: UH310S2420ZC3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310S2413ZG6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 20in Length, Fluorocarbon Seals

Product ID: UH310S2420ZC6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes
729 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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