Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Product Use

Pre-Filtration

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps

Product ID: NXT10010UDOET
Unit of Measure
60/EA
Min Order Qty
60
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 27.25 inches product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 27.25 inches

Product ID: NXT1002725UM18F
Unit of Measure
12/EA
Min Order Qty
12
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 40 inches, EPDM, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 40 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXT0540UM8E
Unit of Measure
12/EA
Min Order Qty
12
Micron
0.5 micron
NXT 100-30U-M7E product photo

Nexis, NXT, 100 μm, 76.2 cm (30 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXT10030UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 20 inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: NXT10020UM18N
Unit of Measure
12/EA
Min Order Qty
12
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-ring product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 40 inches, Nitrile, SOE flat closed end external 222 O-ring

Product ID: NXT10040UM18N
Unit of Measure
24/EA
Min Order Qty
24
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, EPDM, SOE fin end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, EPDM, SOE fin end external 222 O-rings

Product ID: NXT1010UM8E
Unit of Measure
60/EA
Min Order Qty
60
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, EPDM, SOE with internal O-rings (same as M10) closed end with deep recess

Product ID: NXT1010UM20E
Unit of Measure
30/EA
Min Order Qty
60
Micron
10 micron

Discontinued

This part is no longer available. Please contact us for more information.
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 19.5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 19.5 inches

Product ID: NXT100195U
Unit of Measure
10/EA
Min Order Qty
10
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 10 inches, Expand PTFE (gaskets) DOE option FEP encapsulated silicone (O-rings) SOE option, DOE with elastomer gasket seals and end caps

Product ID: NXT1010UDOET
Unit of Measure
30/EA
Min Order Qty
30
Micron
10 micron
Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 100 μm, Polypropylene, Length 10 inches

Product ID: NXT10010U
Unit of Measure
30/EA
Min Order Qty
30
Micron
100 micron
Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings product photo

Nexis® T Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 20 inches, FEP encapsulated Fluorocarbon Elastomer Orings, SOE flat closed end external 222 O-rings

Product ID: NXT1020UM3F
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron
830 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English