Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Seal Material

Nitrile

Anti Static

No

Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 18in 45.72cm (REPLACED BY HC2245FRT18Z)

Product ID: HC2245FCT18HX321
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2245
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
See All Attributes

This product is currently not available. Please contact us for more information.

Supralon™ Lube and Hydraulic Fluid Filter Elements, Removal Rating 12 μm, GlassFiber, Length 6 inches

Product ID: PA08L00AD1
Unit of Measure
100/EA
Min Order Qty
100
Anti-Static
No
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
12 micron
Filter Removal Rating (μm)
12 µm
Nominal Length (Imperial)
6 in
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC2217FCP8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2217
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 10in 25.4cm length

Product ID: HC2238FCN10H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2238
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III 40 micron Nitrile 16in 40.64cm (REPLACED BY HC9600FRR16Z)

Product ID: HC9600FKR16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC9600
Family
Ultipor III
Filter Removal Rating (μm)
40 µm
Nominal Length (Imperial)
16 in
Nominal Length (Metric)
40.64 cm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC7500SRN8HY333)

Product ID: HC7500SKN8HY333
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC7500
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 10in 25.4cm (REPLACED BY HC2236FRS10)

Product ID: HC2236FCS10
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2236
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
12 micron, Beta 1000
See All Attributes

Ultipor® III Filter Element

Product ID: HC9600FKT4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Ultipor® III Filter Element

Product ID: HC9400FKS13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

HC9600FKN16H ELEMENT

Product ID: HC9600FKN16H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9600
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Element Coralon HC2256FCN10H

Product ID: HC2256FCN10H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2256
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron, Beta 1000
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 9in 22.86cm (REPLACED BY HC2544FRP9HYN31)

Product ID: HC2544FKP9HYN31
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2544
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

186 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

    Select Language :
    English