Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

Nexis®

Industries

Industrial Manufacturing

Nexis® T Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches

Product ID: NXT20975U
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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NXTQ 1-10U-M7V 12

Product ID: NXTQ110UM7V12
Unit of Measure
12/EA
Min Order Qty
12

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 29.25 inches

Product ID: NXA052925UDOEE
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 19.5 inches, DOE Santoprene gasket seal

Product ID: NXA3195UH21
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.5 in
Cartridge Length (Metric)
495 mm
Cartridge Length (Metric)
49.5 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps product photo

Nexis® A Series Filter Cartridges, Removal Rating 10 μm, Polypropylene, Length 30 inches, EPDM, DOE with elastomer gasket seals and end caps

Product ID: NXA1030UDOEE
Unit of Measure
12/EA
Min Order Qty
12
Micron
10 micron

Nexis® A Series Filter Cartridges, Removal Rating 70 μm, Polypropylene, Length 30 inches

Product ID: NXA7030U946
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
70 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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MPNT 100-10N

Product ID: MPNT10010N
Unit of Measure
30/EA
Min Order Qty
30

Nexis® A Series Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 40 inches, silicone, SOE flat closed end external 222 O-rings

Product ID: NXA0540UM3S
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 25 μm, Polypropylene, Length 30 inches

Product ID: NXT2530U946
Unit of Measure
10/EA
Min Order Qty
10
Removal Rating
25 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 1 μm, Polypropylene, Length 30 inches, silicone, DOE - DOE with elastomer gasket seals and end caps

Product ID: NXT130UDOES
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
1 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
Silicone
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Nexis® A Series Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches

Product ID: NXA4030U946
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® T Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 40 inches

Product ID: NXT540U664
Unit of Measure
20/EA
Min Order Qty
20
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
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481 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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