Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Use

Air, Gas, and Vent Filtration

Oenopure™ Filter Cartridges, AB1GB7WH4

Product ID: AB1GB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Hydrophillic Polyethersulfone
Effective Filtration Area (Metric cm²)
0.6 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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This product is currently not available. Please contact us for more information.

FEATURED

Emflon® PFRW Filter Cartridge, AB1PFR3WH4

Product ID: AB1PFR3WH4
Unit of Measure
1/EA
Min Order Qty
1

Emflon® PFRW Filter Cartridge, AB1PFR8WH4

Product ID: AB1PFR8WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 8
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
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AB1RK7J

Product ID: AB1RK7J
Unit of Measure
1/EA
Min Order Qty
1

AB1RZ8H4

Product ID: AB1RZ8H4
Unit of Measure
1/EA
Min Order Qty
1

AB1UVI3EHF

Product ID: AB1UVI3EHF
Unit of Measure
1/EA
Min Order Qty
1
FEATURED

Emflon® PFRW Filter Cartridge, AB1PFR7WH4

Product ID: AB1PFR7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.2 µm
Membrane Material
Double Layer PTFE
Effective Filtration Area (Metric cm²)
8000 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
See All Attributes

Oenopure™ Filter Cartridges, AB2GB7WH4

Product ID: AB2GB7WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
0.45 µm
Membrane Material
Hydrophillic Polyethersulfone
Effective Filtration Area (Metric cm²)
1.2 cm²
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
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This product is currently not available. Please contact us for more information.

AB2M1002H1

Product ID: AB2M1002H1
Unit of Measure
1/EA
Min Order Qty
1

AB2P20018JDUP

Product ID: AB2P20018JDUP
Unit of Measure
24/EA
Min Order Qty
24

AB2RJ8J

Product ID: AB2RJ8J
Unit of Measure
1/EA
Min Order Qty
1

Profile® Star Filter Cartridge, AB3A0157WH4

Product ID: AB3A0157WH4
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
1.5 µm
Membrane Material
Polypropylene
Filter Cartridge Style
Code 7
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
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62 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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