Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Gasket / O-Ring Material

NA

Product Use

Pre-Filtration

Filter Media

Polypropylene

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXT3030UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
30 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches

Product ID: NXT310U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 20 inches

Product ID: NXT320U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps) product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXT330U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches product photo

Nexis® T Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 40 inches

Product ID: NXT340U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
3 micron
Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches, DOE 2.54 cm (1 in) extended core product photo

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXT4030U1X
Unit of Measure
1/EA
Min Order Qty
1
Micron
40 micron
Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches product photo

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 inches

Product ID: NXT4030U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
40 micron
Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches product photo

Nexis® T Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 40 inches

Product ID: NXT4040U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
40 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches

Product ID: NXT5010U
Unit of Measure
1/pkg
Min Order Qty
1
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT5010UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 19.5 inches product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 19.5 inches

Product ID: NXT50195U
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal product photo

Nexis® T Filter Cartridges, Removal Rating 50 μm, Polypropylene, Length 20 inches, DOE Santoprene gasket seal

Product ID: NXT5020UH21
Unit of Measure
1/EA
Min Order Qty
1
Micron
50 micron
98 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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