Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Red1000

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 18in 45.72cm (REPLACED BY HC0101FRN18HY514)

Product ID: HC0101FKN18HY514
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0101
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 3in 7.62cm (REPLACED BY HC0896FHN3Z)

Product ID: HC0896FDN3H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC0896
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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Red1000 Glass Fiber 7 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC2006FRN28Z)

Product ID: HC2006FAN28Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2006
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC2207FHP8Z)

Product ID: HC2207FCP8H
Unit of Measure
1/EA
Min Order Qty
6
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2207
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC2216FRN14Z)

Product ID: HC2216FAN14H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2216
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC2217FHP4Z)

Product ID: HC2217FAP4Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2217
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Fluorocarbon 14in 35.6cm (REPLACED BY HC2217FHP14Z)

Product ID: HC2217FCP14Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2217
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 Micron, Beta 1000
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC2217FHT14Z)

Product ID: HC2217FCT14H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2217
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 9in 22.86cm (REPLACED BY HC2225FRN9Z)

Product ID: HC2225FAN9H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2225
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 29in 73.66cm (REPLACED BY HC2225FRP29Z)

Product ID: HC2225FKP29H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2225
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 13in 33.02cm (REPLACED BY HC2233FRN13Z)

Product ID: HC2233FKN13H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2233
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Red1000 Glass Fiber 22 micron (Beta 1000) Nitrile 15in 38.1cm (REPLACED BY HC2236FRT15)

Product ID: HC2236FCT15
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2236
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
22 micron, Beta 1000
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This product is currently not available. Please contact us for more information.

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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