Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

Order Products

Filter Media

Glass Fiber

Nominal OD (Imperial)

1.8 in

Ultipor III Glass Fiber 12 micron (Beta 1000) Fluorocarbon 4in 10.16cm (REPLACED BY HC9021FHS4ZYQ35)

Product ID: HC9021FDS4ZYQ35
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9021
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 25 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC9021FHT4HY497)

Product ID: HC9021FDT4HY497
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9021
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
25 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC9021FHS8Z)

Product ID: HC9021FDS8Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9021
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 25 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC9021FHT4HY923)

Product ID: HC9021FDT4HY923
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9021
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
15 µm
See All Attributes

This product is currently not available. Please contact us for more information.

Ultipor III Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm

Product ID: HC9024FKN8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9024
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 8in 20.32cm (REPLACED BY HC9024FRS8Z)

Product ID: HC9024FKS8H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9024
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 5 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC9024FRP4Z)

Product ID: HC9024FKP4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC9024
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC2196FRN4H50)

Product ID: HC2196FKN4H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2196
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

Element Coralon HC2196FCP4H50

Product ID: HC2196FCP4H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2196
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 Micron, Beta 1000
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2196FRP6H50)

Product ID: HC2196FKP6H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2196
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

This product is currently not available. Please contact us for more information.

46 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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