Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Red1000

HC2286EOJ15H50

Product ID: HC2286EOJ15H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating
22 micron
Filter Removal Rating (μm)
22 µm
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HC2216EOJ4H

Product ID: HC2216EOJ4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2216
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
25 µm
Nominal Length (Imperial)
4 in
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Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 4in 10.16cm length

Product ID: HC2218FKN4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2218
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
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HC2226EOJ6H50

Product ID: HC2226EOJ6H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2226
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
6 in
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HC2233EOJ6H

Product ID: HC2233EOJ6H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2233
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
6 in
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HC2286EOJ12H50

Product ID: HC2286EOJ12H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2286
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
22 µm
Nominal Length (Imperial)
12 in
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HC2296EOS36H50

Product ID: HC2296EOS36H50
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HC2296
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
36 in
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HCY-8300EOS20HYK

Product ID: HCY8300EOS20HYK
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
20 in
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HCY-8300EOS26HYK

Product ID: HCY8300EOS26HYK
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Element Series
HCY830
Family
Red1000
Filter Media
Wire Mesh
Filter Removal Rating (μm)
100 µm
Nominal Length (Imperial)
26 in
See All Attributes

Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 3in 7.62cm (REPLACED BY HCY-0030FRP3Z)

Product ID: HCY-0030FCP3H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HCY-00
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
5 µm
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 7 micron (Beta 1000) Fluorocarbon 8in 20.32cm (REPLACED BY HC2006FRN28Z)

Product ID: HC2006FAN28Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2006
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
See All Attributes

Red1000 Anti-Static Glass Fiber 7 micron (Beta 1000) Nitrile 8in 20.32cm length

Product ID: HC2544FMN28H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 1000
Element Series
HC2544
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
7 µm
See All Attributes

Discontinued

This part is no longer available. Please contact us for more information.
126 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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