Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Brand

Poly-Fine®

Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 19.75 Inches

Product ID: ARD401975UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
19.75 in
Cartridge Length (Metric)
502 mm
Cartridge Length (Metric)
50.2 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 Inches, silicone

Product ID: ARD4030USM7
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
End Configuration
SOE fin end, external 226 O-rings
Change Out Differential Pressure
2.4 bard

Discontinued

This part is no longer available. Please contact us for more information.

Poly-Fine® ARD, Filter Cartridges, Removal Rating 40 μm, Polypropylene, Length 30 Inches

Product ID: ARD4030UH21
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
40 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
End Configuration Code
H21
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Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: ARD510UEM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
End Configuration
SOE flat closed end, external 222 O-rings
Change Out Differential Pressure
2.4 bard

Poly-Fine® ARD, Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 Inches, silicone

Product ID: ARD510USM3
Unit of Measure
1/EA
Min Order Qty
1
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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DPFT 50-40EV 668

Product ID: DPFT5040EV668
Unit of Measure
1/EA
Min Order Qty
1

MCS1201UY060J

Product ID: MCS1201UY060J
Unit of Measure
1/EA
Min Order Qty
1

MPGH02120

Product ID: MPGH02120400
Unit of Measure
1/EA
Min Order Qty
1

PFC0.8-C5

Product ID: PFC08C5
Unit of Measure
1/EA
Min Order Qty
1

PF 2-30AE

Product ID: PF230AE
Unit of Measure
1/EA
Min Order Qty
1

PF 0.8-10AE

Product ID: PF0810AE
Unit of Measure
1/EA
Min Order Qty
1

PF 0.2-30UE-M26

Product ID: PF0230UEM26
Unit of Measure
1/EA
Min Order Qty
1
731 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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