Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Filter Cartridges

Nexis® A Series Filter Cartridges, Polypropylene, Length 20 inches

Product ID: NXAQ320UM8F12
Unit of Measure
24/EA
Min Order Qty
24
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Type
NXAQ
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Nexis® A Series Filter Cartridges, Polypropylene, Length 20 inches

Product ID: NXAQ320UM3F12
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Cartridge Type
NXAQ
Cartridge Outer Diameter (OD) (Imperial)
2.5 in
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, EPDM, Double Open Ended(DOE) with end caps and elastomer gaskets

Product ID: NXAQ510UDOEE12
Unit of Measure
24/EA
Min Order Qty
24
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXT0510UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 20 inches, EPDM, Single Open Ended with double O-ring bayonet lock and fin

Product ID: NXAQ520UM7E12
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, Length 10 inches, EPDM, Single Open Ended with double O-ring bayonet lock and fin

Product ID: NXAQ510UM7E12
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® A Series Filter Cartridges, Removal Rating 5 μm, Polypropylene, EPDM, Double Open Ended(DOE) with end caps and elastomer gaskets

Product ID: NXAQ530UDOEE12
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
5 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
EPDM
End Configuration Code
DOE
End Configuration
DOE - Double Open Ended(DOE) with end caps and elastomer gaskets
Cartridge Type
NXAQ
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NXT 0.5-10U-M7E product photo

Nexis, NXT, 0.5 μm, 25.4 cm (10 in), SOE fin end, external 226 O-rings (retrofits other manufacturers’ Code 7), EPDM gasket

Product ID: NXT0510UM7E
Unit of Measure
1/EA
Min Order Qty
1
Micron
0.5 micron
Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches product photo

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches

Product ID: NXT0510U
Unit of Measure
30/EA
Min Order Qty
30
Micron
0.5 micron

Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, EPDM, SOE flat closed end external 222 O-rings

Product ID: NXT0510UM3E
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
EPDM
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone, SOE fin end external 226 O-rings

Product ID: NXT0510UM7S
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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Nexis® T Filter Cartridges, Removal Rating 0.5 μm, Polypropylene, Length 10 inches, silicone, DOE with elastomer gasket seals and end caps

Product ID: NXT0510UDOES
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
0.5 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
Silicone
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4,361 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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