Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Housings, Vessels, and Assemblies

Material of Construction

Iron|Steel

Athalon, 6000psi Simplex Hsg, 1.25in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310E2020ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Athalon, 6000psi Non-bypass Simplex Hsg, 2in BSP Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310C3220ZN
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
BSP
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310E3213ZGH
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 8in Length, Fluorocarbon Seals

Product ID: UH310K2408ZC6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
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Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UH310E3240ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: UH310E2408ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: UH310E2413ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 40in Length, Fluorocarbon Seals

Product ID: UH310E3240ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
40 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 2in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310E3220ZG
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: UH310K2413ZG6
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Flange Ports, 20in Length, Fluorocarbon Seals

Product ID: UH310E2420ZC
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes

Athalon, 6000psi Simplex Hsg, 1.5in Manifold Mount, 20in Length, Fluorocarbon Seals

Product ID: UH310S2420ZG3
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Side Manifold Mount
Cartridge Length (Imperial)
20 in
Family
Athalon
Pressure Rating
6000 psi
Port Size
1.5 in
Number of Cartridges
1
See All Attributes
364 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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