Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Product Type

Housings, Vessels, and Assemblies

Ultipor, 6000psi Non-bypass Simplex Hsg, 1.25in SAE Ports, 16in Length, Fluorocarbon Seals

Product ID: HZ9661A20UW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
16 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1.25 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1in SAE Ports, 4in Length, Fluorocarbon Seals

Product ID: HZ9801A16RW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1in Flange Ports, 8in Length, Fluorocarbon Seals

Product ID: HZ9801E16SW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
8 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1in Flange Ports, 13in Length, Fluorocarbon Seals

Product ID: HZ9801E16TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 1in Manifold Mount, 13in Length, Fluorocarbon Seals

Product ID: HZ9801K16TW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Top Manifold Mount
Cartridge Length (Imperial)
13 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
1 in
Number of Cartridges
1
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Ultipor, 6000psi Simplex Hsg, 2in Flange Ports, 39in Length, Fluorocarbon Seals

Product ID: HZ9900E32XB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (6000 #)
Cartridge Length (Imperial)
39 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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Ultipor, 6000psi Simplex Hsg, 2in Flange Ports, 39in Length, Fluorocarbon Seals

Product ID: HZ9900D32XB1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (3000 #)
Cartridge Length (Imperial)
39 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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Ultipor, 6000psi Non-bypass Simplex Hsg, 2in Flange Ports, 26in Length, Fluorocarbon Seals

Product ID: HZ9901D32VW1
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
Imperial Flange (3000 #)
Cartridge Length (Imperial)
26 in
Family
Ultipor
Pressure Rating
6000 psi
Port Size
2 in
Number of Cartridges
1
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This product is currently not available. Please contact us for more information.

HZF310A16CNSGD1X160 ASSEMBLY FILTER

Product ID: HZF310A16CNSS00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
8 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1 in
Number of Cartridges
1
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Discontinued

This part is no longer available. Please contact us for more information.

HZF310A16CSRB11X160 FILTER ASSEMBLY

Product ID: HZF310A16CSRB00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
4 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1 in
Number of Cartridges
1
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Versalon, 1015psi Simplex Hsg, 1.25in SAE Ports, 10in Length, Fluorocarbon Seals

Product ID: HZF410A20CSKG00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
10 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1.25 in
Number of Cartridges
1
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HZF410A24CSTG11X160 FILTER ASSEMBLY

Product ID: HZF410A24CSTG00001
Unit of Measure
1/EA
Min Order Qty
1
Inlet/Outlet Connections Type
SAE Straight Thread
Cartridge Length (Imperial)
13 in
Family
Versalon
Pressure Rating
1015 psi
Port Size
1.5 in
Number of Cartridges
1
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729 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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