Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Availability

In Stock

Anti Static

No

Filter Media

Glass Fiber

Red1000 Glass Fiber 7 micron (Beta 1000) Nitrile 6in 15.24cm (REPLACED BY HC2256FRN6Z)

Product ID: HC2256FCN6H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2256
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
7 micron, Beta 1000
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This product is currently not available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 18in 45.72cm (REPLACED BY HC2296FRS18H50X301)

Product ID: HC2296FKS18H50X301
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2296
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
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Red1000 Glass Fiber 5 micron (Beta 1000) Nitrile 18in 45.72cm (REPLACED BY HC2618FRP18Z)

Product ID: HC2618FKP18H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC2618
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating
5 micron (Beta 1000)
See All Attributes

Ultipor III Glass Fiber 7 micron (Beta 1000) Fluorocarbon 13in 33.02cm (REPLACED BY HC6400FRN13Z)

Product ID: HC6400FDN13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
7 micron (Beta 1000)
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Discontinued

This part is no longer available. Please contact us for more information.

Red1000 Glass Fiber 12 micron (Beta 1000) Nitrile 16in 40.64cm length (REPLACED BY HC6900FRS16Z)

Product ID: HC6900FCS16HX321
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC6900
Family
Red1000
Filter Media
Glass Fiber
Filter Removal Rating (μm)
12 µm
See All Attributes

Ultipor III Glass Fiber 12 micron (Beta 1000) Nitrile 4in 10.16cm (REPLACED BY HC7400SRS4Z)

Product ID: HC7400SKS4H
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
No
Beta Rating
BETA 1000
Element Series
HC7400
Family
Ultipor III
Filter Media
Glass Fiber
Filter Removal Rating
12 micron (Beta 1000)
See All Attributes
54 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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