Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Media

Kieselguhr, Perlite and Cellulose Fibers

SUPRApak SH 5900 LW

Product ID: 5303133
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
16 in
Diameter (Metric)
410 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
86.1 ft²
Filtration Area (Metric)
8 m²
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SUPRAdisc SD II EK 1 200XEK1C440SPW

Product ID: 7007931
Unit of Measure
1/EA
Min Order Qty
1
Adaptor End Configuration
Double Open End, Flat Gasket
1. Recommended Max. Backpressure During Backwash
0.5 bar
Plastic Material
Polypropylene
2. Recommended Max. Backpressure During Backwash
7.25 psid
Adaptor Type
Double Open End, Flat Gasket
Core Drainage Discs
Polypropylene
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Seitz® K Series Depth Filter Sheets, K 200 400x400

Product ID: B07628
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® K Series Depth Filter Sheets, SEITZ-EKS 200x200

Product ID: B08456
Unit of Measure
400/EA
Min Order Qty
400
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
0.42 ft²
Filter Area (Metric)
0.04 m²
Hot Water Sanitization
90 °C
Recommended max.dp
1.5 bar
Size (Imperial)
7.8 x 7.8 in
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T 1500 400x400

Product ID: 1415041
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
1 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® HS Series Depth Filter Sheets, HS 1000 400x400

Product ID: 1431061
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.73 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
90 °C
Recommended max.dp
3 bar
Size (Imperial)
15.8 x 15.8 in
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Seitz® HS Series Depth Filter sheet, HS 400 400x400

Product ID: 1430457
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.72 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
1.5 bar
Size (Imperial)
15.75 x 15.75 in
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Seitz® HS Series Depth Filter sheet, HS 4000 400x400

Product ID: 1434042
Unit of Measure
100/EA
Min Order Qty
100
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
1.72 ft²
Filter Area (Metric)
0.16 m²
Hot Water Sanitization
85 °C
Recommended max.dp
3 bar
Size (Imperial)
15.75 x 15.75 in
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Seitz® K Series Depth Filter Sheets, for Fine Filtration, SEITZ-EK 1 933x933 4L54

Product ID: 5300515
Unit of Measure
25/EA
Min Order Qty
25
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filter Area (Imperial)
9.35 ft²
Filter Area (Metric)
0.87 m²
Hot Water Sanitization
90 °C
Recommended max.dp
1.5 bar
Size (Imperial)
36.7 x 36.7 in
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Discontinued

This part is no longer available. Please contact us for more information.

SUPRApak PH 5900 SW

Product ID: 5303066/S
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
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SUPRApak PH 5900 MW

Product ID: 5303066/M
Unit of Measure
1/EA
Min Order Qty
1
Core Drainage Discs
Polypropylene
Diameter (Imperial)
12 in
Diameter (Metric)
285 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
29.1 ft²
Filtration Area (Metric)
2.7 m²
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SUPRApak PW 5200 SW

Product ID: 5302800/S
Unit of Measure
1/EA
Min Order Qty
1
Diameter (Imperial)
7.5 in
Diameter (Metric)
183 mm
Filter Media
Kieselguhr, Perlite and Cellulose Fibers
Filtration Area (Imperial)
4.3 ft²
Filtration Area (Metric)
0.4 m²
Food Contact Compliant
Yes
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78 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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