Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Gasket / O-Ring Material

NA

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 9.75 inches, DOE industrial (no end caps)

Product ID: NXA20975U
Unit of Measure
60/EA
Min Order Qty
60
Removal Rating
20 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
9.75 in
Cartridge Length (Metric)
248 mm
Cartridge Length (Metric)
24.8 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Polypropylene, Length 40 inches

Product ID: NXA240U
Unit of Measure
12/EA
Min Order Qty
12
Membrane Material
Polypropylene
Cartridge Length (Imperial)
40 in
Cartridge Length (Metric)
1016 mm
Cartridge Length (Metric)
101.6 cm
Gasket / O-Ring Material
NA
End Configuration Code
BLANK
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Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene

Product ID: NXA301UH21
Unit of Measure
6/EA
Min Order Qty
6
Removal Rating
30 µm
Membrane Material
Polypropylene
Gasket / O-Ring Material
NA
End Configuration Code
H21
End Configuration
H21 - DOE, Santoprene gasket seal
Cartridge Type
NXA
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Discontinued

This part is no longer available. Please contact us for more information.

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 10 inches

Product ID: NXA3010UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE industrial (no end caps)

Product ID: NXA3020U
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 20 inches, DOE 2.54 cm (1 in) extended core

Product ID: NXA3020U1X
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
20 in
Cartridge Length (Metric)
508 mm
Cartridge Length (Metric)
50.8 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps) product photo

Nexis® A Series Filter Cartridges, Removal Rating 20 μm, Polypropylene, Length 40 inches, DOE industrial (no end caps)

Product ID: NXA2040U
Unit of Measure
12/EA
Min Order Qty
12
Micron
20 micron
NXA 30-19.75U-H21 product photo

Nexis, NXA, 30 μm, 50.2 cm (19.75 in), DOE, Santoprene gasket seal

Product ID: NXA301975UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE industrial (no end caps)

Product ID: NXA3030U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
30 in
Cartridge Length (Metric)
762 mm
Cartridge Length (Metric)
76.2 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 29.25 inches

Product ID: NXA302925U
Unit of Measure
12/EA
Min Order Qty
12
Removal Rating
30 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
29.25 in
Cartridge Length (Metric)
743 mm
Cartridge Length (Metric)
74.3 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 3 μm, Polypropylene, Length 10 inches, DOE Santoprene gasket seal

Product ID: NXA310UH21
Unit of Measure
30/EA
Min Order Qty
30
Removal Rating
3 µm
Membrane Material
Polypropylene
Cartridge Length (Imperial)
10 in
Cartridge Length (Metric)
254 mm
Cartridge Length (Metric)
25.4 cm
Gasket / O-Ring Material
NA
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Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal product photo

Nexis® A Series Filter Cartridges, Removal Rating 30 μm, Polypropylene, Length 30 inches, DOE Santoprene gasket seal

Product ID: NXA3030UH21
Unit of Measure
12/EA
Min Order Qty
12
Micron
30 micron
427 Items

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

*Please refer to the documentation for additional specifications.

 

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)
Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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