Profile® Nano Depth Filter Cartridge

For CMP Applications in Microelectronics

Profile Nano advanced depth filter cartridges are high-performance slurry filters that classify ceria and low solids colloidal silica slurries. They are used in chemical mechanical planarization (CMP) processes such as shallow trench isolation (STI) and barrier copper.

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Filter Removal Rating

3 µm

Product Use

Lube and Hydraulic Oil Filtration

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 4 Inches

Product ID: HC7500SRZ4Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC7500
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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SRT ELEMENT UE209AZ07Z

Product ID: UE209AZ07ZYT03
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE209
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 26 Inches

Product ID: HC8900FRZ26Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8900
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Athalon Glass Fiber 3 micron (Beta 2000) Fluorocarbon 20in 50.8cm

Product ID: UE299AZ20Z
Unit of Measure
15/EA
Min Order Qty
15
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE299
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 13 Inches

Product ID: HC8904FRZ13Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC8904
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 8 inches

Product ID: HC9600FRZ8J
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9600
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 1 inches

Product ID: HC9020FRZ1Z
Unit of Measure
12/EA
Min Order Qty
12
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9020
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
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Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 13 inches

Product ID: HC9601FHZ13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC9601
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
See All Attributes

Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 13 inches

Product ID: HC4704FRZ13Z
Unit of Measure
6/EA
Min Order Qty
6
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC4704
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
See All Attributes

ELEMENT UE210AZ13Z

Product ID: UE210AZ13Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE210
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
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Supralon™ Lube and Hydraulic Elements, Removal Rating 3 μm, GlassFiber, Length 20 Inches

Product ID: HC2225FRZ20Z
Unit of Measure
1/EA
Min Order Qty
1
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
HC2225
Family
Supralon
Filter Media
Glass Fiber
Filter Removal Rating
3 micron (Beta 2000)
See All Attributes

Athalon Glass Fiber 3 micron (Beta 2000) Fluorocarbon 4in 10.16cm

Product ID: UE299AZ04Z
Unit of Measure
16/EA
Min Order Qty
16
Anti-Static
Yes
Beta Rating
BETA 2000
Element Series
UE299
Family
Athalon
Filter Media
Glass Fiber
Filter Removal Rating (μm)
3 µm
See All Attributes

Description

Why choose Profile Nano depth filter cartridges for CMP applications?

 

These CMP filters efficiently remove particles as fine as 100 nm with the help of extremely fine fibers manufactured via a highly advanced melt-blowing process.

 

Additional benefits include:

 

  • High removal efficiency for particles predominantly captured by sieving and other mechanical filtration mechanisms
  • Each zone is manufactured to a given specification, ensuring consistent and reproducible performance
  • Steep efficiency curves result in minimal strip-out of desirable slurry particles while sharply increasing removal of oversized particles

Product Highlights: 

  • Higher performance
  • For fine particle removal
  • Includes multi-zone pore construction
  • Longer service life

Applications/Use

Microelectronics:

  • Semiconductor – CMP

Specifications

Materials
  • Medium: Polypropylene
  • Core, cage, and endcaps: polypropylene
  • O-ring options: ethylene propylene (EPR)
Removal ratings
  • 100 nm
Configurations
  • Nominal length:

             102 mm / 4 in, 254 mm / 10 in, 508 mm / 20 in, 762 mm / 30 in, 1016 mm / 40 in

  • Diameter:

             63 mm / 2.5 in

  • O-ring size / end caps:

             Code 19 (222 double O-ring flat end)

Operating conditions
  • Maximum operating temperature: 
             82°C / 180°F
  • Maximum differential pressure:

            0.41 MPa @ 30°C / 60 psid @ 85°F

            0.34 MPa @ 50°C / 50 psid @ 120°F

            0.2 MPa @ 70°C / 30 psid @ 160°F

            0.1 MPa @ 82°C / 15 psid @ 180°F

Documents

Data Sheets

  • Profile® Nano Filters for CMP Applications

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